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Epitaxial growth of Si/SiGe and Ge/SiGe stacks using isotopically purified 28SiH4 and 73Ge-depleted GeH4 for spin qubit
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Defect-centric modeling of capacitance-voltage characteristics of SiGe/Si/SiGe heterostructures at cryogenic temperatures
(2025) -
Radio frequency single electron transmission spectroscopy of a semiconductor Si/SiGe quantum dot
(2025) -
300 mm production compatible fabrication of quantum computing devices
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300mm fabrication of silicon quantum dot spin qubits using 0.33NA EUV lithography