Ghent University Academic Bibliography

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Monte Carlo Simulation of Anomalous Erosion in Large Area Sputter Magnetrons

G BUYLE, Diederik Depla (UGent) , Karin Eufinger (UGent) , Roger De Gryse (UGent) and W DE BOSSCHER

(2005) Society of Vacuum Coaters Technical Conference Proceedings 1991-2005.
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Characterization of the Electron Movement in Varying Magnetic Fields and the Resulting Anomalous Erosion

Guy Buyle, Diederik Depla (UGent) , Karin Eufinger (UGent) , Johan Haemers (UGent) , Roger De Gryse (UGent) and W DE BOSSCHER

(2004) Technical Conference Proceedings 1991-2004 Society of Vacuum Coaters.
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Simplified model for the DC planar magnetron discharge

Guy Buyle, Diederik Depla (UGent) , Karin Eufinger (UGent) , Johan Haemers (UGent) , W De Bosscher and Roger De Gryse (UGent)

(2004) VACUUM. 74(3-4). p.353-358
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Dissection of the Planar Magnetron Discharge

Guy Buyle, Diederik Depla (UGent) , Karin Eufinger (UGent) , Johan Haemers (UGent) , Roger De Gryse (UGent) and W DE BOSSCHER

(2003) Technical Conference Proceedings 1991-2003 Society of Vacuum Coaters.
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- Journal Article
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Simplified model for calculating the pressure dependence of a direct current planar magnetron discharge

Guy Buyle, Diederik Depla (UGent) , Karin Eufinger (UGent) , Johan Haemers (UGent) , Roger De Gryse (UGent) and W De Bosscher

(2003) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 21(4). p.1218-1224
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Recapture of secondary electrons by the target in a DC planar magnetron discharge

Guy Buyle, W De Bosscher, D Dopla, Karin Eufinger (UGent) , Johan Haemers (UGent) and Roger De Gryse (UGent)

(2003) VACUUM. 70(1). p.29-35
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- Conference Paper
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Uniformity Control in Sputter Deposition Processes.

W DE BOSSCHER, Anja Blondeel and Guy Buyle

(2002) 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002.. p.135-141
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Importance of recapture of secondary electrons in cylindrical and planar magnetron discharges.

Guy Buyle, Diederik Depla (UGent) , Karin Eufinger (UGent) , Johan Haemers (UGent) , Roger De Gryse (UGent) and W DE BOSSCHER

(2002) CZECHOSLOVAK JOURNAL OF PHYSICS.
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Low pressure Behaviour of the sputter magnetron discharge

Guy Buyle, Diederik Depla (UGent) , W DE BOSSCHER, Karin Eufinger (UGent) , Johan Haemers (UGent) and Roger De Gryse (UGent)

(2002) 2002 IEEE International Conference on Record Abstracts and Plasma Science / Nuclear and Plasma Sciences Society Staff IEEE, Piscataway (NJ USA) 2002, p. 218. -.

Academic Bibliography

Monte Carlo Simulation of Anomalous Erosion in Large Area Sputter Magnetrons

Characterization of the Electron Movement in Varying Magnetic Fields and the Resulting Anomalous Erosion

Simplified model for the DC planar magnetron discharge

Dissection of the Planar Magnetron Discharge

Simplified model for calculating the pressure dependence of a direct current planar magnetron discharge

Recapture of secondary electrons by the target in a DC planar magnetron discharge

Uniformity Control in Sputter Deposition Processes.

Importance of recapture of secondary electrons in cylindrical and planar magnetron discharges.

Low pressure Behaviour of the sputter magnetron discharge

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