Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Ciofi, Ivan" or (type any "bookEditor issueEditor" and editor="Ciofi, Ivan") Add to list Journal Article A1 Sealed ultra low-k organosilica films with improved electrical, mechanical and chemical properties Frederik Goethals (UGent) , Elisabeth Levrau, Glenn Pollefeyt (UGent) , Mikhail R Baklanov, Ivan Ciofi, Kris Vanstreels, Christophe Detavernier (UGent) , Isabel Van Driessche (UGent) and Pascal Van Der Voort (UGent) (2013) JOURNAL OF MATERIALS CHEMISTRY C. 1(25). p.3961-3966 Add to list Journal Article A1 A new procedure to seal the pores of mesoporous low-k films with precondensed organosilica oligomers Frederik Goethals (UGent) , Mikhail R Baklanov, Ivan Ciofi, Christophe Detavernier (UGent) , Pascal Van Der Voort (UGent) and Isabel Van Driessche (UGent) (2012) CHEMICAL COMMUNICATIONS. 48(22). p.2797-2799 Add to list Journal Article A1 Ultra low-k cyclic carbon-bridged PMO films with a high chemical resistance Frederik Goethals (UGent) , Ivan Ciofi, Oreste Madia, Kris Vanstreels, Mikhail R Baklanov, Christophe Detavernier (UGent) , Pascal Van Der Voort (UGent) and Isabel Van Driessche (UGent) (2012) JOURNAL OF MATERIALS CHEMISTRY. 22(17). p.8281-8286 Add to list Conference Paper P1 Manufacturability issues with Double Patterning for 50nm half pitch single damascene applications, using RIELACS (R) shrink and corresponding OPC Maaike Op de Beeck (UGent) , Janko Versluijs, Vincent Wiaux, Tom Vandeweyer, Ivan Ciofi, Herbert Struyf, Dirk Hendrickx and Jan Van Olmen (2007) OPTICAL MICROLITHOGRAPHY XX, PTS 1-3. In Proceedings of SPIE 6520.