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- Journal Article
- A1
- open access
A 2D MEMS grating based CMOS compatible poly-SiGe variable optical attenuator
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- Journal Article
- A1
- open access
Static and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valves
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Novel Miniaturized Packaging for Implantable Electronic Devices
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Reliability Study of Reference Semiconductor Encapsulation Materials for Biocompatible Packaging
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SiGe MEMS technology: a platform technology enabling different demonstrators
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- Journal Article
- A1
- open access
SiGe based grating light valves: a leap towards monolithic integration of MOEMS
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Grating light valves: a SiGe based approach towards monolithic integration of MOEMS