Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Brissonneau, V." or (type any "bookEditor issueEditor" and editor="Brissonneau, V.") Add to list Conference Paper C3 Inline X-ray metrology for complementary field-effect transistors (CFET) J. Bogdanowicz, A. Mingardi, V. Brissonneau, Roger Loo (UGent) , Y. Shimura, A. Akula, P. P. Gowda, D. Zhou, N. Horiguchi, S. Biesemans, et al. (2025) SPIE Advanced Lithography and Patterning Conference : Metrology, Inspection, and Process Control XXXIX, Abstracts. Add to list Conference Paper C3 open access Complementary Field-Effect Transistors (CFET) : metrology challenges and solutions J. Bogdanowicz, A.-L. Charley, M. Saib, M. Beggiato, G. Lorusso, V. Brissonneau, E. Dupuy, Roger Loo (UGent) , Y. Shimura, A. Akula, et al. (2024) International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN 2024), Abstracts.