Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Bogdanowicz, J." or (type any "bookEditor issueEditor" and editor="Bogdanowicz, J.") Add to list Conference Paper Epitaxial growth of up to 120x {Si0.8Ge0.2 / Si} bilayers in view of 3D DRAM applications Roger Loo (UGent) , M. Beggiato, Y. Shimura, N. Rassoul, W. Vanherle, F. Seidel, K. Paulussen, J. Bogdanowicz, A. Merkulov, M. Ayyad, et al. (2025) Add to list Conference Paper C3 Inline X-ray metrology for complementary field-effect transistors (CFET) J. Bogdanowicz, A. Mingardi, V. Brissonneau, Roger Loo (UGent) , Y. Shimura, A. Akula, P. P. Gowda, D. Zhou, N. Horiguchi, S. Biesemans, et al. (2025) SPIE Advanced Lithography and Patterning Conference : Metrology, Inspection, and Process Control XXXIX, Abstracts. Add to list Journal Article A1 open access Epitaxial Si/SiGe multi-stacks : from stacked nano-sheet to fork-sheet and CFET devices Roger Loo (UGent) , A. Akula, Y. Shimura, C. Porret, E. Rosseel, T. Dursap, A. Y. Hikavyy, M. Beggiato, J. Bogdanowicz, A. Merkulov, et al. (2025) ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY. 14(1). Add to list Conference Paper C3 open access Complementary Field-Effect Transistors (CFET) : metrology challenges and solutions J. Bogdanowicz, A.-L. Charley, M. Saib, M. Beggiato, G. Lorusso, V. Brissonneau, E. Dupuy, Roger Loo (UGent) , Y. Shimura, A. Akula, et al. (2024) International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN 2024), Abstracts.