Ghent University Academic Bibliography

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Sputter deposition of MgxAlyOz thin films in a dual-magnetron device: a multi-species Monte Carlo model

M Yusupov, Marta Martins Saraiva (UGent) , Diederik Depla (UGent) and A Bogaerts

(2012) NEW JOURNAL OF PHYSICS. 14.
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Behavior of electrons in a dual-magnetron sputter deposition system: a Monte Carlo model

M Yusupov, E Bultinck, Diederik Depla (UGent) and A Bogaerts

(2011) NEW JOURNAL OF PHYSICS. 13.
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- Journal Article
- A1
- open access
Elucidating the asymmetric behavior of the discharge in a dual magnetron sputter deposition system

M Yusupov, E Bultinck, Diederik Depla (UGent) and A Bogaerts

(2011) APPLIED PHYSICS LETTERS. 98(13).
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The influence of Cr and Y on the micro structural evolution of Mg―Cr―O and Mg-Y-O thin films

N Jehanathan, V Georgieva, Marta Martins Saraiva (UGent) , Diederik Depla (UGent) , A Bogaerts and G Van Tendeloo

(2011) THIN SOLID FILMS. 519(16). p.5388-5396
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Fundamental aspects of mixed oxide thin film growth

Marta Martins Saraiva (UGent) , V Georgieva, N Jehanathan, Stijn Mahieu (UGent) , Wouter Leroy (UGent) , R Persoons, G Van Tendeloo, A Bogaerts and Diederik Depla (UGent)

(2011) ICMCTF 2011 : 38th ICMCTF : program, technical sessions, abstracts, exibition. p.119-120
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Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model

M Yusupov, E Bultinck, Marta Martins Saraiva (UGent) , Wouter Leroy (UGent) , Diederik Depla (UGent) and A Bogaerts

(2010) Reactive sputter deposition 2010 : ninth International conference on reactive sputter deposition.
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- Journal Article
- A1
Particle-in-cell Monte Carlo modeling of Langmuir probes in an Ar plasma

A CENIAN, A CHEMUKHO, A BOGAERTS, R GIJBELS and Christophe Leys (UGent)

(2005) JOURNAL OF APPLIED PHYSICS. 97(12).
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- Conference Paper
- C1
Langmuir-probe diagnostic of high pressure plasmas: study by PIC-MC modelling

A CENIAN, A CHERNUKHO, A BOGAERTS, R GIJBELS and Christophe Leys (UGent)

(2004) Proceedings of the International Workshop on Cold Atmospheric Plasmas: Sources and Applications. p.61-64
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- Conference Paper
- C1
Ionization density in hydrocarbon flames - numerical modelling

A MIGOUN, A CENIAN, A CHERNUKHO, A BOGAERTS, R GIJBELS and Christophe Leys (UGent)

(2004) Proceedings of the International Workshop on Cold Atmospheric Plasmas: Sources and Applications. p.130-133
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- Journal Article
- A1
Modeling of the target surface modification by reactive ion implantation during magnetron sputtering

Diederik Depla (UGent) , ZY CHEN, A BOGAERTS, V IGNATOVA, Roger De Gryse (UGent) and R GIJBELS

(2004) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 22(4). p.1524-1529

Academic Bibliography

Sputter deposition of MgxAlyOz thin films in a dual-magnetron device: a multi-species Monte Carlo model

Behavior of electrons in a dual-magnetron sputter deposition system: a Monte Carlo model

Elucidating the asymmetric behavior of the discharge in a dual magnetron sputter deposition system

The influence of Cr and Y on the micro structural evolution of Mg―Cr―O and Mg-Y-O thin films

Fundamental aspects of mixed oxide thin film growth

Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model

Particle-in-cell Monte Carlo modeling of Langmuir probes in an Ar plasma

Langmuir-probe diagnostic of high pressure plasmas: study by PIC-MC modelling

Ionization density in hydrocarbon flames - numerical modelling

Modeling of the target surface modification by reactive ion implantation during magnetron sputtering

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