Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Biesemans, Serge" or (type any "bookEditor issueEditor" and editor="Biesemans, Serge") Add to list Conference Paper P1 Inline X-ray metrology for Complementary Field-Effect Transistors (CFET) Janusz Bogdanowicz, Andrea Mingardi, Vincent Brissonneau, Roger Loo (UGent) , Yosuke Shimura, Anjani Akula, Pallavi P. Gowda, Daisy Zhou, Naoto Horiguchi, Serge Biesemans, et al. (2025) METROLOGY, INSPECTION, AND PROCESS CONTROL XXXIX. In Proceedings of SPIE 13426. Add to list Journal Article A2 open access Source/drain epitaxy for nanosheet-based CFET devices Erik Rosseel, Clement Porret, Thomas Dursap, Roger Loo (UGent) , Hans Mertens, Jishnu Ganguly, Ritam Sarkar, Camila Cavalcante, Olivier Richard, Jef Geypen, et al. (2024) ECS TRANSACTIONS. 114(2). p.29-36 Add to list Journal Article A1 Seed layer and multistack approaches to reduce leakage in SrTiO3-based metal-insulator-metal capacitors using TiN bottom electrode Nicolas Menou, Mihaela Popovici, Karl Opsomer, Ben Kaczer, Malgorzata A Pawlak, Christoph Adelmann, Alexis Franquet, Paola Favia, Hugo Bender, Christophe Detavernier (UGent) , et al. (2010) JAPANESE JOURNAL OF APPLIED PHYSICS. 49(4).