Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Biesemans, S." or (type any "bookEditor issueEditor" and editor="Biesemans, S.") Add to list Conference Paper C3 Inline X-ray metrology for complementary field-effect transistors (CFET) J. Bogdanowicz, A. Mingardi, V. Brissonneau, Roger Loo (UGent) , Y. Shimura, A. Akula, P. P. Gowda, D. Zhou, N. Horiguchi, S. Biesemans, et al. (2025) SPIE Advanced Lithography and Patterning Conference : Metrology, Inspection, and Process Control XXXIX, Abstracts.