Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Beyer, Gerald" or (type any "bookEditor issueEditor" and editor="Beyer, Gerald") Add to list Conference Paper P1 Direct copper electrochemical deposition on Ru-based substrates for advanced interconnects target 30 nm and 1/2 pitch lines : from coupon to full-wafer experiments Silvia Armini, Steven Demuynck, Zaid El-mekki, Johan Swerts, Magi Margalit Nagar (UGent) , Aleksandar Radisic, Nancy Heylen, Gerald Beyer, Leonardus Leunissen and Philippe M Vereecken (2011) ECS Transactions. 35(2). p.117-123