Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Berman, Sarah" or (type any "bookEditor issueEditor" and editor="Berman, Sarah") Add to list Journal Article A1 open access Analysis of stress in sputter-deposited films using a kinetic model for Cu, Ni, Co, Cr, Mo, W Tong Su, Zhaoxia Rao, Sarah Berman, Diederik Depla (UGent) and Eric Chason (2023) APPLIED SURFACE SCIENCE. 613. Add to list Journal Article A1 open access Understanding residual stress in thin films : analyzing wafer curvature measurements for Ag, Cu, Ni, Fe, Ti, and Cr with a kinetic model Zhaoxia Rao, Sarah Berman, Peilin Yang, Diederik Depla (UGent) and Eric Chason (2021) JOURNAL OF APPLIED PHYSICS. 130(13).