Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Beggiato, Matteo" or (type any "bookEditor issueEditor" and editor="Beggiato, Matteo") Add to list Conference Paper P1 open access 3D-DRAM Si/SiGe superlattices : inspection strategies and evaluation Matteo Beggiato, Roger Loo (UGent) , Sun Wei, Alain Moussa, Gerhard Bast, Kaoru Fukaya, Dorin Cerbu, Nachiketa Janardan, Konstantin Chirko, Han Han, et al. (2025) METROLOGY, INSPECTION, AND PROCESS CONTROL XXXIX. In Proceedings of SPIE 13426. Add to list Conference Paper P1 Detection of crystalline defects in Si/SiGe superlattices towards 3D-DRAM applications Matteo Beggiato, Dorin Cerbu, Roger Loo (UGent) , Wei Sun, Alain Moussa, Gerhard Bast, Kaoru Fukaya, Christophe Beral, Anne-Laure Charley, Nachiketa Janardan, et al. (2024) Metrology, Inspection, and Process Control XXXVIII. In Proceedings of SPIE 12955. Add to list Journal Article A2 open access Epitaxial Si/SiGe multi-stacks : from stacked nano-sheet to fork-sheet and CFET devices Roger Loo (UGent) , Anjani Akula, Yosuke Shimura, Clement Porret, Erik Rosseel, Thomas Dursap, Andriy Yakovitch Hikavyy, Matteo Beggiato, Janusz Bogdanowicz, Alex Merkulov, et al. (2024) ECS TRANSACTIONS. 114(2). p.15-28