Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Beggiato, M." or (type any "bookEditor issueEditor" and editor="Beggiato, M.") Add to list Journal Article A1 open access Epitaxial growth of up to 120× {Si0.8Ge0.2/Si} bilayers in view of three dimensional dynamic random access memory applications Roger Loo (UGent) , M. Beggiato, Y. Shimura, N. Rassoul, W. Vanherle, F. Seidel, K. Paulussen, A. Merkulov, M. Ayyad, I. Lee, et al. (2025) JOURNAL OF APPLIED PHYSICS. 138(5). Add to list Journal Article A1 open access Epitaxial Si/SiGe multi-stacks : from stacked nano-sheet to fork-sheet and CFET devices Roger Loo (UGent) , A. Akula, Y. Shimura, C. Porret, E. Rosseel, T. Dursap, A. Y. Hikavyy, M. Beggiato, J. Bogdanowicz, A. Merkulov, et al. (2025) ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY. 14(1). Add to list Conference Paper C1 Process insights into 3D-DRAM with vertical bit line and scalable GAA transistor N. Rassoul, L. A. Labbate, G. Eneman, A. Fantini, R. Ritzenthaler, J. Loyo Prado, Roger Loo (UGent) , Wouter Devulder (UGent) , E. Dupuy, T. Peissker, et al. (2025) 2025 Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits). Add to list Conference Paper C3 open access Complementary Field-Effect Transistors (CFET) : metrology challenges and solutions J. Bogdanowicz, A.-L. Charley, M. Saib, M. Beggiato, G. Lorusso, V. Brissonneau, E. Dupuy, Roger Loo (UGent) , Y. Shimura, A. Akula, et al. (2024) International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN 2024), Abstracts.