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Conformality of thermal and plasma enhanced atomic layer deposition on a non-woven fibrous substrate
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Discharge voltage measurements during magnetron sputtering
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Influence of the target composition on the discharge voltage during magnetron sputtering
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Hysteresis behavior during reactive magnetron sputtering of A(2)O(3) using a rotating cylindrical magnetron
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A Monte Carlo simulation of the erosion profile of a rotating cylindrical magnetron
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Influence of the geometrical configuration on the plasma ionization distribution and erosion profile of a rotating cylindrical magnetron: a Monte Carlo simulation
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An in-situ reduction/oxidation XAS study on the EL10V8 VOx/TiO2(Anatase) powder catalyst
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Monte Carlo Simulation of Anomalous Erosion in Large Area Sputter Magnetrons