Ghent University Academic Bibliography

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Source/drain epitaxy and contacts for CFET applications

Clement Porret, Thomas Dursap, Anjani Akula, Erik Rosseel, Bert Pollefliet, Jean-Luc Everaert, Kiroubanand Sankaran, Alex Merkulov, Keisuke Yamamoto, Paola Favia, et al.

(2025) 22nd International Workshop on Junction Technology 2025 (IWJT). p.47-50
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Source/drain epitaxy and contact silicides for CFET applications

Clement Porret, Thomas Dursap, Anjani Akula, Erik Rosseel, Bert Pollefliet, Jean-Luc Everaert, Kiroubanand Sankaran, Alex Merkulov, Olivier Richard, Paola Favia, et al.

(2025) ECS Meeting Abstracts. MA2025-02(36). p.1741-1741
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Inline X-ray metrology for Complementary Field-Effect Transistors (CFET)

Janusz Bogdanowicz, Andrea Mingardi, Vincent Brissonneau, Roger Loo (UGent) , Yosuke Shimura, Anjani Akula, Pallavi P. Gowda, Daisy Zhou, Naoto Horiguchi, Serge Biesemans, et al.

(2025) METROLOGY, INSPECTION, AND PROCESS CONTROL XXXIX. In Proceedings of SPIE 13426.
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Epitaxial SiGe/Si multi-stacks : stacked nano-sheet to fork-sheet and CFET devices

Roger Loo (UGent) , Clement Porret, Erik Rosseel, Anjani Akula, Yosuke Shimura, Thomas Dursap, Andriy Hikavyy, Hans Mertens, Naoto Horiguchi and Robert Langer

(2024) ECS Meeting Abstracts.
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- Journal Article
- A2
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Epitaxial Si/SiGe multi-stacks : from stacked nano-sheet to fork-sheet and CFET devices

Roger Loo (UGent) , Anjani Akula, Yosuke Shimura, Clement Porret, Erik Rosseel, Thomas Dursap, Andriy Yakovitch Hikavyy, Matteo Beggiato, Janusz Bogdanowicz, Alex Merkulov, et al.

(2024) ECS TRANSACTIONS. 114(2). p.15-28
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Epitaxial SiGe/Si multi-stacks for complementary FET devices

Roger Loo (UGent) , Anjani Akula, Clement Porret, Dong Wang, Keisuke Yamamoto, Tamás Sipőcz, Árpád Kerekes, Alex Merkulov, Mustafa Ayyad, Han Han, et al.

(2023) 14th International workshop on New Group IV Semiconductor Nanoelectronics, Proceedings.

Academic Bibliography

Source/drain epitaxy and contacts for CFET applications

Source/drain epitaxy and contact silicides for CFET applications

Inline X-ray metrology for Complementary Field-Effect Transistors (CFET)

Epitaxial SiGe/Si multi-stacks : stacked nano-sheet to fork-sheet and CFET devices

Epitaxial Si/SiGe multi-stacks : from stacked nano-sheet to fork-sheet and CFET devices

Epitaxial SiGe/Si multi-stacks for complementary FET devices

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