Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Akagawa, M." or (type any "bookEditor issueEditor" and editor="Akagawa, M.") Add to list Journal Article A1 open access The role of backscattered neutrals on the phase composition of sputter deposited tungsten thin films Farzaneh Ahangarani Farahani (UGent) , M. Akagawa, T. Shimizu and Diederik Depla (UGent) (2026) APPLIED SURFACE SCIENCE. 718.