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Deposition of thin films by sputtering cold isostatically pressed powder targets: a case study
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- Journal Article
- A1
- open access
The fictional transition of the preferential orientation of yttria-stabilized zirconia thin films
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Modeling reactive magnetron sputtering: fixing the parameter set
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Angular-resolved energy flux measurements of a dc- and HIPIMS-powered rotating cylindrical magnetron in reactive and non-reactive atmosphere
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Sputter deposited transition metal nitrides as back electrode for CIGS solar cells
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Smart textiles: an explorative study of the use of magnetron sputter deposition
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High power impulse magnetron sputtering using a rotating cylindrical magnetron
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Experimental determination and simulation of the angular distribution of the metal flux during magnetron sputter deposition
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Rotating cylindrical magnetron sputtering: simulation of the reactive process
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Quantification of the incorporation coefficient of a reactive gas on a metallic film during magnetron sputtering: the method and results