Ghent University Academic Bibliography

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Study on reactive sputtering of yttrium oxide: process and thin film properties

Pei Lei, Wouter Leroy (UGent) , Bing Dai, Jiaqi Zhu, Xiaoting Chen, Jiecai Han and Diederik Depla (UGent)

(2015) SURFACE & COATINGS TECHNOLOGY. 276. p.39-46
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Momentum transfer driven textural changes of CeO2 thin films

Sigelinde Van Steenberge, Wouter Leroy (UGent) , A Hubin and Diederik Depla (UGent)

(2014) APPLIED PHYSICS LETTERS. 105(11).
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Influence of the target-substrate distance on the growth of YSZ thin films

Jérika Lamas (UGent) , Wouter Leroy (UGent) and Diederik Depla (UGent)

(2014) SURFACE & COATINGS TECHNOLOGY. 241. p.26-29
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- Journal Article
- A1
- open access
Influence of oxygen flow and film thickness on the texture and microstructure of sputtered ceria thin films

Sigelinde Van Steenberge, Wouter Leroy (UGent) and Diederik Depla (UGent)

(2014) THIN SOLID FILMS. 553. p.2-6
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Using the macroscopic scale to predict the nano-scale behavior of YSZ thin films

Jérika Lamas (UGent) , Wouter Leroy (UGent) , Y-G Lu, J Verbeeck, G Van Tendeloo and Diederik Depla (UGent)

(2014) SURFACE & COATINGS TECHNOLOGY. 238. p.45-50
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- Journal Article
- A1
- open access
The influence of target surface morphology on the deposition flux during direct-current magnetron sputtering

Francis Boydens (UGent) , Wouter Leroy (UGent) , Rosita Persoons and Diederik Depla (UGent)

(2013) THIN SOLID FILMS. 531. p.32-41
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Influence of particle and energy flux on stress and texture development in magnetron sputtered TiN films

Grégory Abadias, Wouter Leroy (UGent) , Stijn Mahieu (UGent) and Diederik Depla (UGent)

(2013) JOURNAL OF PHYSICS D-APPLIED PHYSICS. 46(5).
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Magnetron sputter deposition as visualized by Monte Carlo modeling

Diederik Depla (UGent) and Wouter Leroy (UGent)

(2012) THIN SOLID FILMS. 520(20). p.6337-6354
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Thirty years of rotatable magnetrons

Roger De Gryse (UGent) , Johan Haemers (UGent) , Wouter Leroy (UGent) and Diederik Depla (UGent)

(2012) THIN SOLID FILMS. 520(18). p.5833-5845
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Influence of target-substrate distance and composition on the preferential orientation of yttria-stabilized zirconia thin films

Jérika Lamas (UGent) , Wouter Leroy (UGent) and Diederik Depla (UGent)

(2012) THIN SOLID FILMS. 520(14). p.4782-4785

Academic Bibliography

Study on reactive sputtering of yttrium oxide: process and thin film properties

Momentum transfer driven textural changes of CeO2 thin films

Influence of the target-substrate distance on the growth of YSZ thin films

Influence of oxygen flow and film thickness on the texture and microstructure of sputtered ceria thin films

Using the macroscopic scale to predict the nano-scale behavior of YSZ thin films

The influence of target surface morphology on the deposition flux during direct-current magnetron sputtering

Influence of particle and energy flux on stress and texture development in magnetron sputtered TiN films

Magnetron sputter deposition as visualized by Monte Carlo modeling

Thirty years of rotatable magnetrons

Influence of target-substrate distance and composition on the preferential orientation of yttria-stabilized zirconia thin films

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