Show 50 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: parent exact "Atomic Layer Deposition, 8th International conference, Abstracts" Add to list Conference Paper C3 open access Conformality of thermal and plasma enhanced ALD Jolien Dendooven (UGent) , Jan Musschoot, Davy Deduytsche (UGent) , Roland Vanmeirhaeghe (UGent) and Christophe Detavernier (UGent) (2008) Atomic Layer Deposition, 8th International conference, Abstracts.