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On the role of chemisorption in the formation of the target surface compound layer during reactive magnetron sputtering
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Sputter deposition with powder targets : an overview
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Nitride formation during reactive sputter deposition of multi-principal element alloys in argon/nitrogen mixtures
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Anomalous effects in the aluminum oxide sputtering yield
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Impurity-controlled film growth and elastic properties of CoCrCuFeNi thin films
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Structural evolution and growth mechanisms of RF-magnetron sputter-deposited hydroxyapatite thin films on the basis of unified principles
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On the target surface cleanness during magnetron sputtering
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On the target surface cleanness during magnetron sputtering
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On the effective sputter yield during magnetron sputter deposition
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The role of the erosion groove during reactive sputter deposition
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Thirty years of rotatable magnetrons
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Influence of target-substrate distance and composition on the preferential orientation of yttria-stabilized zirconia thin films
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Compositional effects on the growth of Mg(M)O films
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Qualitative model of the magnetron discharge
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Particle-in-cell/Monte Carlo collisions model for the reactive sputter deposition of nitride layers