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Formation and texture of palladium germanides studied by in situ X-ray diffraction and pole figure measurements
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TaCN growth with PDMAT and H-2/Ar plasma by plasma enhanced atomic layer deposition
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- Journal Article
- A1
- open access
Phase formation and thermal stability of ultrathin nickel-silicides on Si(100)
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Conformality of Al2O3 and AlN deposited by plasma-enhanced atomic layer deposition
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Texture of cobalt germanides on Ge(100) and Ge(111) and its influence on the formation temperature
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In situ X-ray diffraction study of thin film Ir/Si solid state reactions
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In situ x-ray diffraction study of Ni-Yb interlayer and alloy systems on Si(100)
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In situ and ex situ investigation on the annealing performance of the ZnO film grown by ion beam deposition
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The effects of deposition temperature and ambient on the physical and electrical performance of DC-sputtered n-ZnO/p-Si heterojunction
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In situ study of the formation of silicide phases in amorphous Co-Si mixed layers
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- Conference Paper
- P1
- open access
The texture of thin NiSi films and its effect on agglomeration
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Comparison of thermal and plasma enhanced ALD/CVD of vanadium pentoxide
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In situ x-ray diffraction study of metal induced crystallization of amorphous germanium
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Ru thin film grown on TaN by plasma enhanced atomic layer deposition
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Modeling the conformality of atomic layer deposition: the effect of sticking probability
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- Conference Paper
- C3
- open access
Modeling the conformality of atomic layer deposition: the effect of sticking probability
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In situ study of the formation of silicide phases in amorphous Ni-Si mixed layers
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Metal in-diffusion during Fe and co-germanidation of germanium
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Formation and stability of NiSi in the presence of Co and Fe alloying elements
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- Conference Paper
- C3
- open access
Conformality of thermal and plasma enhanced ALD
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Epitaxial formation of a metastable hexagonal nickel-silicide
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Growth kinetics and crystallization behavior of TiO2 films prepared by plasma enhanced atomic layer deposition
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Yttrium silicide formation and its contact properties on Si(100)
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In-situ X-ray Diffraction study of Metal Induced Crystallization of amorphous silicon
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Effects of the barrier metal thickness and hydrogen pre-annealing on the characteristic parameters of Au/n-GaAs metal-semiconductor Schottky contacts
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Study of metal-related deep-level defects in germanide Schottky barriers on n-type germanium
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Physical and optical properties of ZnO thin films grown by DC sputtering deposition
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- Journal Article
- A1
- open access
Thin film solid-state reactions forming carbides as contact materials for carbon-containing semiconductors
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Fundamentals of intrinsic stress during silicide formation
(2007) Sixth international conference of the Balkan Physical Union. In AIP Conference Proceedings 899. p.453-454 -
Point-defect generation in ni-, pd-, and pt-germanide Schottky barriers on n-type germanium
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Oxidation suppression in ytterbium silicidation by Ti/TiN bicapping layer
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Growth of pinhole-free ytterbium silicide film by solid-state reaction on Si(001) with a thin amorphous Si interlayer
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Atomic layer deposition of TiO2 from tetrakis-dimethyl-amido titanium or Ti isopropoxide precursors and H2O
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Effect of Pt addition on the stress of NiSi film formed on Si(100).
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Characterization of the texture of silicide films using electron backscattered diffraction
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Formation and morphological stability of NiSi in the presence of W, Ti, and Ta alloying elements
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Influence of Ge substrate crystallinity on Co germanide formation in solid-state reactions
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In-situ X-ray diffraction measurements for monitoring carbide and silicide phase formation
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In-situ X-ray diffraction measurements for monitoring carbide and silicide phase formation
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Point-defect generation in Ni-,Pd-, and Pt-germanided Schottky barriers on n-type germanium
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The effect of Schottky metal thickness on barrier height inhomogeneity in identically prepared Au/n-GaAs Schottky diodes
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- Journal Article
- A1
- open access
Solid-state formation of titanium carbide and molybdenum carbide as contacts for carbon-containing semiconductors
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Tungsten carbides as a diffusion barrier for Cu metallization
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Deep level transient spectroscopy study of nickel-germanide Schottky barriers on n-type germanium
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Deep level transient spectroscopy study of Pd and Pt sputtering damage in n-type germanium
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A deep-level transient spectroscopy study of Co- and Ni-germanided n-type germanium
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Linear growth of Ni2Si thin film on n+/p junction at low temperature
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The barrier height inhomogeneity in identically prepared Au/n-GaAs Schottky barrier diodes
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Voltage dependence of effective barrier height reduction in inhomogeneous Schottky diodes
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Electrical characterization of NiSi/Si interfaces formed by a single and a two-step rapid thermal silicidation