Show 50 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact 002002038065 cql: author exact 002004034952 Add to list Journal Article A1 Texture of atomic layer deposited ruthenium Jan Musschoot, Qi Xie (UGent) , Davy Deduytsche (UGent) , Koen De Keyser, Delphine Longrie (UGent) , Johan Haemers (UGent) , Sven Van den Berghe, Roland Van Meirhaeghe, Jan D'Haen and Christophe Detavernier (UGent) (2010) MICROELECTRONIC ENGINEERING. 87(10). p.1879-1883