Show 50 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Yusupov, M" or (type any "bookEditor issueEditor" and editor="Yusupov, M") Add to list Journal Article A1 Sputter deposition of MgxAlyOz thin films in a dual-magnetron device: a multi-species Monte Carlo model M Yusupov, Marta Martins Saraiva (UGent) , Diederik Depla (UGent) and A Bogaerts (2012) NEW JOURNAL OF PHYSICS. 14. Add to list Journal Article A1 Behavior of electrons in a dual-magnetron sputter deposition system: a Monte Carlo model M Yusupov, E Bultinck, Diederik Depla (UGent) and A Bogaerts (2011) NEW JOURNAL OF PHYSICS. 13. Add to list Journal Article A1 open access Elucidating the asymmetric behavior of the discharge in a dual magnetron sputter deposition system M Yusupov, E Bultinck, Diederik Depla (UGent) and A Bogaerts (2011) APPLIED PHYSICS LETTERS. 98(13). Add to list Conference Paper C3 Simulation of an Ar/O2 magnetron discharge in single and dual configurations with a hybrid model M Yusupov, E Bultinck, Marta Martins Saraiva (UGent) , Wouter Leroy (UGent) , Diederik Depla (UGent) and A Bogaerts (2010) Reactive sputter deposition 2010 : ninth International conference on reactive sputter deposition.