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Sputter deposited transition metal nitrides as back electrode for CIGS solar cells
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Rotating cylindrical magnetron sputtering: simulation of the reactive process
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Experimental determination and simulation of the angular distribution of the metal flux during magnetron sputter deposition
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Compositional effects on the growth of Mg(M)O films
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Modeling the flux of high energy negative ions during reactive magnetron sputtering
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Computer modelling of magnetron discharges
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The metal flux from a rotating cylindrical magnetron: a Monte Carlo simulation
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Dependence of the sticking coefficient of sputtered atoms on the target-substrate distance
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Quantification of the ion and momentum fluxes toward the substrate during reactive magnetron sputtering