Show 5 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: subject exact "Technology and Engineering" cql: author exact 002002038065 or (type exact bookEditor and editor exact 002002038065) Add to list Journal Article A1 Conformality of thermal and plasma enhanced atomic layer deposition on a non-woven fibrous substrate Jan Musschoot, Jolien Dendooven (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) , G Buyle and Christophe Detavernier (UGent) (2012) SURFACE & COATINGS TECHNOLOGY. 206(22). p.4511-4517 Add to list Journal Article A1 Qualitative model of the magnetron discharge Jan Musschoot and Johan Haemers (UGent) (2010) VACUUM. 84(4). p.488-493 Add to list Journal Article A1 Texture of atomic layer deposited ruthenium Jan Musschoot, Qi Xie (UGent) , Davy Deduytsche (UGent) , Koen De Keyser, Delphine Longrie (UGent) , Johan Haemers (UGent) , Sven Van den Berghe, Roland Van Meirhaeghe, Jan D'Haen and Christophe Detavernier (UGent) (2010) MICROELECTRONIC ENGINEERING. 87(10). p.1879-1883 Add to list Journal Article A1 Atomic layer deposition of titanium nitride from TDMAT precursor Jan Musschoot, Qi Xie, Davy Deduytsche (UGent) , Sven Van den Berghe, Roland Van Meirhaeghe and Christophe Detavernier (UGent) (2009) MICROELECTRONIC ENGINEERING. 86(1). p.72-77 Add to list Journal Article A1 Investigation of the sustaining mechanisms of dc magnetron discharges and consequences for I-V characteristics Jan Musschoot, Diederik Depla (UGent) , Guy Buyle, Johan Haemers (UGent) and Roger De Gryse (UGent) (2008) Journal of Phyics D: Applied Physics. 41(1). 1 2 Next →