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Plasma-enhanced atomic layer deposition : correlating O2 plasma parameters and species to blister formation and conformal film growth
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On the grain size-thickness correlation for thin films
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Nitride formation during reactive sputter deposition of multi-principal element alloys in argon/nitrogen mixtures
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- Journal Article
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Understanding residual stress in thin films : analyzing wafer curvature measurements for Ag, Cu, Ni, Fe, Ti, and Cr with a kinetic model
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- Journal Article
- A1
- open access
The growth of a multi-principal element (CoCrFeMnNi) oxynitride film by direct current magnetron sputtering using air as reactive gas