Show 5 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Tokei, Zsolt*" or (type exact bookEditor and editor="Tokei, Zsolt*") Add to list Conference Paper P1 Ultra-low copper baths for sub-35 nm copper interconnects Tanya Atanasova (UGent) , Katrien Strubbe (UGent) , Laureen Carbonell, Rudy Caluwaerts, Zsolt Tokei and Philippe M Vereecken (2012) ECS Transactions. 41(35). p.83-97 Add to list Conference Paper C3 Ultra-low copper baths for sub-35 nm copper interconnects Tanya Atanasova (UGent) , Katrien Strubbe (UGent) , Laureen Carbonell, Rudy Caluwaerts, Zsolt Tokei and Philippe Vereecken (2011) ECS Meeting Abstracts. 41. Add to list Conference Paper P1 A novel plasma-assisted shrink process to enlarge process windows of narrow trenches and contacts for 45nm node applications and beyond - art. no. 65190U Maaike Op de Beeck (UGent) , Janko Versluijs, Zsolt Tokei, Steven Demuynck, J-F De Marneffe, Werner Boullart, Serge Vanhaelemeersch, Helen Zhu, Peter Cirigliano, Elizabeth Pavel, et al. (2007) Advances in Resist Materials and Processing Technology XXIV. In ARRAY(0x91903d8) 6519. p.U5190-U5190