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On the microstructure of magnesium thin films deposited by magnetron sputtering
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- Journal Article
- A1
- open access
The target material influence on the current pulse during high power pulsed magnetron sputtering
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Angle-resolved energy flux measurements of a HIPIMS-powered rotating cylindrical magnetron in reactive and nonreactive atmosphere
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Angular-resolved energy flux measurements of a dc- and HIPIMS-powered rotating cylindrical magnetron in reactive and non-reactive atmosphere