Ghent University Academic Bibliography

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- Conference Paper
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Monte Carlo Simulation of Anomalous Erosion in Large Area Sputter Magnetrons

G BUYLE, Diederik Depla (UGent) , Karin Eufinger (UGent) , Roger De Gryse (UGent) and W DE BOSSCHER

(2005) Society of Vacuum Coaters Technical Conference Proceedings 1991-2005.
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- Conference Paper
- C1
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Characterization of the Electron Movement in Varying Magnetic Fields and the Resulting Anomalous Erosion

Guy Buyle, Diederik Depla (UGent) , Karin Eufinger (UGent) , Johan Haemers (UGent) , Roger De Gryse (UGent) and W DE BOSSCHER

(2004) Technical Conference Proceedings 1991-2004 Society of Vacuum Coaters.
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Simplified model for the DC planar magnetron discharge

Guy Buyle, Diederik Depla (UGent) , Karin Eufinger (UGent) , Johan Haemers (UGent) , W De Bosscher and Roger De Gryse (UGent)

(2004) VACUUM. 74(3-4). p.353-358
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- Conference Paper
- C1
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Dissection of the Planar Magnetron Discharge

Guy Buyle, Diederik Depla (UGent) , Karin Eufinger (UGent) , Johan Haemers (UGent) , Roger De Gryse (UGent) and W DE BOSSCHER

(2003) Technical Conference Proceedings 1991-2003 Society of Vacuum Coaters.
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- Journal Article
- A1
- open access
Simplified model for calculating the pressure dependence of a direct current planar magnetron discharge

Guy Buyle, Diederik Depla (UGent) , Karin Eufinger (UGent) , Johan Haemers (UGent) , Roger De Gryse (UGent) and W De Bosscher

(2003) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 21(4). p.1218-1224

Academic Bibliography

Monte Carlo Simulation of Anomalous Erosion in Large Area Sputter Magnetrons

Characterization of the Electron Movement in Varying Magnetic Fields and the Resulting Anomalous Erosion

Simplified model for the DC planar magnetron discharge

Dissection of the Planar Magnetron Discharge

Simplified model for calculating the pressure dependence of a direct current planar magnetron discharge

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