Show 250 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Lang, Heinrich" or (type any "bookEditor issueEditor" and editor="Lang, Heinrich") Add to list Journal Article A1 ALD-grown seed layers for electrochemical copper deposition integrated with different diffusion barrier systems Thomas Waechtler, Shao-Feng Ding, Lutz Hofmann, Robert Mothes, Qi Xie (UGent) , Steffen Oswald, Christophe Detavernier (UGent) , Stefan E Schulz, Xin-Ping Qu, Heinrich Lang, et al. (2011) MICROELECTRONIC ENGINEERING. 88(5). p.684-689