Show 20 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: publisher exact "ECS, The Electrochemical Society" Add to list Conference Paper C3 Ultra-low copper baths for sub-35 nm copper interconnects Tanya Atanasova (UGent) , Katrien Strubbe (UGent) , Laureen Carbonell, Rudy Caluwaerts, Zsolt Tokei and Philippe Vereecken (2011) ECS Meeting Abstracts. 41.