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The transformation behaviour of 'alucones', deposited by molecular layer deposition, in nanoporous Al2O3 layers
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Molecular layer deposition of 'vanadicone', a vanadium-based hybrid material, as an electrode for lithium-ion batteries
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Molecular layer deposition of 'titanicone', a titanium-based hybrid material, as an electrode for lithium-ion batteries
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- Journal Article
- A1
- open access
Modification of ultra low-k dielectric films by O₂ and CO₂ plasmas
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In situ IR spectroscopic investigation of alumina ALD on porous silica films: thermal versus plasma-enhanced ALD
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Atomic layer deposition-based tuning of the pore size in mesoporous thin films studied by in situ grazing incidence small angle X-ray scattering
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- Journal Article
- A1
- open access
Pore narrowing of mesoporous silica materials
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Low temperature atomic layer deposition of platinum using (methylcyclopentadienyl)trimethylplatinum and ozone
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Sealed ultra low-k organosilica films with improved electrical, mechanical and chemical properties
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Atomic layer deposition of TiO₂ on surface modified nanoporous low-k films
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Tuning the pore size of ink-bottle mesopores by atomic layer deposition
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In situ X-ray fluorescence measurements during atomic layer deposition: nucleation and growth of TiO2 on planar substrates and in nanoporous films