Show 20 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: keyword exact "TITANIUM NITRIDE FILMS" Add to list Journal Article A1 Influence of the magnetic field configuration on the reactive sputter deposition of TiN Francis Boydens (UGent) , Stijn Mahieu (UGent) , Johan Haemers (UGent) and Diederik Depla (UGent) (2010) PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE. 207(1). p.124-128