Show 20 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact 801000771108 cql: author exact 002005087202 Add to list Journal Article A1 Plasma enhanced atomic layer deposition of Ga2O3 thin films Ranjith Karuparambil Ramachandran (UGent) , Jolien Dendooven (UGent) , Jonas Botterman (UGent) , Sreeprasanth Pulinthanathu Sree, Dirk Poelman (UGent) , Johan A Martens, Hilde Poelman (UGent) and Christophe Detavernier (UGent) (2014) JOURNAL OF MATERIALS CHEMISTRY A. 2(45). p.19232-19238