Show 20 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Schulz, Stefan E" or (type any "bookEditor issueEditor" and editor="Schulz, Stefan E") Add to list Journal Article A1 The inhibition of enhanced Cu oxidation on ruthenium/diffusion barrier layers for Cu interconnects by carbon alloying into Ru Shao-Feng Ding, Qi Xie (UGent) , Steve Müeller, Thomas Waechtler, Hai-Sheng Lu, Stefan E Schulz, Christophe Detavernier (UGent) , Xin-Ping Qu and Thomas Gessner (2011) JOURNAL OF THE ELECTROCHEMICAL SOCIETY. 158(12). p.H1228-H1232 Add to list Journal Article A1 ALD-grown seed layers for electrochemical copper deposition integrated with different diffusion barrier systems Thomas Waechtler, Shao-Feng Ding, Lutz Hofmann, Robert Mothes, Qi Xie (UGent) , Steffen Oswald, Christophe Detavernier (UGent) , Stefan E Schulz, Xin-Ping Qu, Heinrich Lang, et al. (2011) MICROELECTRONIC ENGINEERING. 88(5). p.684-689