Show 20 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Dhayalan, Sathish kumar" or (type exact bookEditor and editor="Dhayalan, Sathish kumar") Add to list Journal Article A1 open access On the evolution of strain and electrical properties in As-grown and annealed Si:P epitaxial films for source-drain stressor applications Sathish kumar Dhayalan, Jiri Kujala, Jonatan Slotte, Geoffrey Pourtois, Eddy Simoen (UGent) , Erik Rosseel, Andriy Hikavyy, Yosuke Shimura, Roger Loo and Wilfried Vandervorst (2018) ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY. 7(5). p.P228-P237 Add to list Conference Paper C1 Substitutional carbon loss in Si:C stressor layers probed by deep-level transient spectroscopy Eddy Simoen (UGent) , Sathish Kumar Dhayalan, Andriy Yakovitch Hikavyy, Roger Loo, Erik Rosseel, Henk Vrielinck (UGent) and Johan Lauwaert (UGent) (2016) ECS Transactions. 75(4). p.3-11