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Study on physio-chemical properties of plasma polymerization in C2H2/N2 plasma and their impact on COL X
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On the plasma chemistry of CH4-H2-Ar system relevant to diamond deposition process by plasma enhanced chemical vapor deposition
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Chemical kinetics simulation of deposition and sp2/sp3 bond ratio of diamond-like carbon film in plasma
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Investigation of synthesis-gas production via CH4-O2-Ar gas mixture using microwave plasma torch