Show 15 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Caluwaerts, Rudy" or (type any "bookEditor issueEditor" and editor="Caluwaerts, Rudy") Add to list Conference Paper P1 Ultra-low copper baths for sub-35 nm copper interconnects Tanya Atanasova (UGent) , Katrien Strubbe (UGent) , Laureen Carbonell, Rudy Caluwaerts, Zsolt Tokei and Philippe M Vereecken (2012) ECS Transactions. 41(35). p.83-97 Add to list Conference Paper C3 Ultra-low copper baths for sub-35 nm copper interconnects Tanya Atanasova (UGent) , Katrien Strubbe (UGent) , Laureen Carbonell, Rudy Caluwaerts, Zsolt Tokei and Philippe Vereecken (2011) ECS Meeting Abstracts. 41.