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Influence of particle and energy flux on stress and texture development in magnetron sputtered TiN films
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Quantification of the incorporation coefficient of a reactive gas on a metallic film during magnetron sputtering : the method and results
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Linking reactive sputtering models to experimental reality by determining the real-time parameters
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Characterization of Mg-Al oxides grown by reactive magnetron sputtering
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- Conference Paper
- C1
- open access
Deposition of biaxially aligned YSZ layers by dual unbalanced magnetron sputtering