Show 100 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="FUJINAGA, M" or (type any "bookEditor issueEditor" and editor="FUJINAGA, M") Add to list Journal Article A1 INFLUENCE OF SHIFTER ERRORS ON THE PRINTABILITY OF L/S STRUCTURES USING THE ALTERNATED PHASE-SHIFTING DESIGN - SIMULATIONS AND EXPERIMENTS Maaike Op de Beeck (UGent) , K RONSE, K KAMON, M FUJINAGA, H KUSUNOSE and H MORIMOTO (1992) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. 10(6). p.2468-2479 Add to list Conference Paper P1 IMPROVEMENT OF FOCUS AND EXPOSURE LATITUDE BY THE USE OF PHASE-SHIFTING MASKS FOR DUV APPLICATIONS Maaike Op de Beeck (UGent) , A TOKUI, M FUJINAGA, N YOSHIOKA, K KAMON, T HANAWA and K TSUKAMOTO (1991) OPTICAL/LASER MICROLITHOGRAPHY IV. In ARRAY(0x87ea2e0) 1463. p.180-196