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Photocatalytic lithography with atomic layer deposited TiO2 films to tailor biointerface properties
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Atomic layer deposition of localised boron- and hydrogen-doped aluminium oxide using trimethyl borate as a dopant precursor
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Photocatalytic lithography with atomic layer-deposited TiO2 films to tailor biointerface properties
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Atomic layer deposition of Al2O3 using aluminum triisopropoxide (ATIP) : a combined experimental and theoretical study
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Atomic layer deposition of vanadium oxides : process and application review
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Effectiveness of ligand denticity-dependent oxidation protection in copper MOD inks
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Nitrogen doping of Al- and Ti-phosphate through plasma-enhanced ALD
(2019) -
- Conference Paper
- C3
- open access
Time-resolved in-situ mass spectrometry for monitoring and identifying reaction products in ALD processes
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Fingerprinting of ALD reaction products with time-resolved in situ mass spectrometry
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3D LiMn2O4 thin-film electrodes for high rate all solid-state lithium and Li-ion microbatteries