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Chemical and structural configuration of Pt-doped metal oxide thin films prepared by atomic layer deposition
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- Conference Paper
- C3
- open access
Chemical selectivity and nucleation during ALD of Ru with the RuO4 precursor
(2019) -
- Conference Paper
- C3
- open access
In situ X-ray based characterization of atomic layer deposition
(2019) -
- Conference Paper
- C3
- open access
Time-resolved in-situ mass spectrometry for monitoring and identifying reaction products in ALD processes
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Fingerprinting of ALD reaction products with time-resolved in situ mass spectrometry
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- Conference Paper
- C1
- open access
On-chip surface enhanced raman spectroscopy using ALD grown plasmonic nanotrenches integrated with a silicon nitride slot waveguide
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Atomic layer deposition of ZnO-SnO2 composite thin film : the influence of structure, composition and crystallinity on lithium-ion battery performance
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- Conference Paper
- C3
- open access
Cost-reducing PE-ALD processes for pure and doped SiO2 thin films
(2019) -
Formation and functioning of bimetallic nanocatalysts : the power of X-ray probes
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- Journal Article
- A1
- open access
Bifunctional earth-abundant phosphate/phosphide catalysts prepared via atomic layer deposition for electrocatalytic water splitting