Show
Sort by
-
PE-ALD of lithium aluminum silicon oxide solid electrolyte layers using LiHMDS
-
Conformal vanadium oxides beyond crystalline V2O5 as high energy density 3D thin-film electrodes for lithium-ion batteries
-
Plasma-enhanced atomic layer deposition of iron and titanium phosphates as electrode materials for 3D-structured lithium-ion microbatteries
-
- Journal Article
- A1
- open access
Atomic layer deposition of vanadium oxides for thin-film lithium-ion battery applications
-
Plasma-enhanced atomic layer deposition of zinc phosphate
-
Plasma-enhanced atomic layer deposition of iron phosphate as a positive electrode for 3D lithium-ion microbatteries
-
- Journal Article
- A1
- open access
Atomic layer deposition of aluminum phosphate based on the plasma polymerization of trimethyl phosphate