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Monte Carlo Simulation of Anomalous Erosion in Large Area Sputter Magnetrons
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- Conference Paper
- C1
- open access
Characterization of the Electron Movement in Varying Magnetic Fields and the Resulting Anomalous Erosion
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Simplified model for the DC planar magnetron discharge
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- Conference Paper
- C1
- open access
Dissection of the Planar Magnetron Discharge
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Recapture of secondary electrons by the target in a DC planar magnetron discharge
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Simplified model for calculating the pressure dependence of a direct current planar magnetron discharge
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Uniformity Control in Sputter Deposition Processes.
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Low pressure Behaviour of the sputter magnetron discharge
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Importance of recapture of secondary electrons in cylindrical and planar magnetron discharges.
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Titanium silicide p-Si Schottky barriers formed by rapid thermal processing in nitrogen