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Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
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- Conference Paper
- C3
- open access
Low temperature plasma-enhanced ALD of vanadium nitride as copper diffusion barrier
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- Conference Paper
- C3
- open access
Plasma-enhanced atomic layer deposition of thin vanadium nitride layers as a copper diffusion barrier
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- Conference Paper
- C3
- open access
Semiconductor-metal transition in thin VO2 films deposited by ozone based atomic layer deposition
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- Conference Paper
- C3
- open access
Semiconductor-metal transition in thin VO2 films grown by ozone based atomic layer deposition
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Semiconductor-metal transition in thin VO2 films grown by ozone based atomic layer deposition