- 2021
-
On the grain size-thickness correlation for thin films
Dulmaa Altangerel
UGent, Florian Cougnon, Robin Dedoncker
UGent and Diederik Depla
UGent
(2021)
ACTA MATERIALIA.
212.
-
Sputter deposition with powder targets : an overview
Diederik Depla
UGent
(2021)
VACUUM.
184.
-
Influence of impurities on the front velocity of sputter deposited Al/CuO thermite multilayers
Dulmaa Altangerel
UGent and Diederik Depla
UGent
(2021)
MATERIALS.
14(23).
-
Sputter deposited metal layers embedded in composites : from fundamentals to applications
Florian Cougnon, Mathias Kersemans
UGent, Wim Van Paepegem
UGent and Diederik Depla
UGent
(2021)
COATINGS.
11(2).
-
The growth of a multi-principal element (CoCrFeMnNi) oxynitride film by direct current magnetron sputtering using air as reactive gas
G. Radnóczi, Robin Dedoncker
UGent, G.Z. Radnóczi, Zs. Czigány, A. Sulyok, V. Kovács-Kis and Diederik Depla
UGent
(2021)
SURFACE & COATINGS TECHNOLOGY.
421.
-
Nitride formation during reactive sputter deposition of multi-principal element alloys in argon/nitrogen mixtures
Diederik Depla
UGent, Robin Dedoncker
UGent and Koen Strijckmans
UGent
(2021)
THIN SOLID FILMS.
732.
-
Influence of the nitrogen content on the structure and properties of MoNbTaVW high entropy alloy thin films
Ao Xia, Robin Dedoncker
UGent, Oleksandr Glushko, Megan J. Cordill, Diederik Depla
UGent and Robert Franz
(2021)
JOURNAL OF ALLOYS AND COMPOUNDS.
850.
-
Understanding residual stress in thin films : analyzing wafer curvature measurements for Ag, Cu, Ni, Fe, Ti, and Cr with a kinetic model
Zhaoxia Rao, Sarah Berman, Peilin Yang, Diederik Depla
UGent and Eric Chason
(2021)
JOURNAL OF APPLIED PHYSICS.
130(13).
-
Plasma-enhanced atomic layer deposition : correlating O2 plasma parameters and species to blister formation and conformal film growth
Andreas Werbrouck
UGent, Kevin Van de Kerckhove, Diederik Depla
UGent, Dirk Poelman
UGent, Philippe Smet
UGent, Jolien Dendooven
UGent and Christophe Detavernier
UGent
(2021)
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A.
39(6).
- 2020
-
Sputter yield measurements to evaluate the target state during reactive magnetron sputtering
Roeland Schelfhout
UGent, Koen Strijckmans
UGent and Diederik Depla
UGent
(2020)
SURFACE & COATINGS TECHNOLOGY.
399.