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In situ x-ray diffraction study of Ni-Yb interlayer and alloy systems on Si(100)

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FILMS, MARKER, FULLY SILICIDED GATES

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Chicago
Knaepen, Werner, J Demeulemeester, J Jordan-Sweet, A Vantomme, Christophe Detavernier, Roland Vanmeirhaeghe, and C Lavoie. 2010. “In Situ X-ray Diffraction Study of Ni-Yb Interlayer and Alloy Systems on Si(100).” Journal of Vacuum Science & Technology A 28 (1): 20–26.
APA
Knaepen, W., Demeulemeester, J., Jordan-Sweet, J., Vantomme, A., Detavernier, C., Vanmeirhaeghe, R., & Lavoie, C. (2010). In situ x-ray diffraction study of Ni-Yb interlayer and alloy systems on Si(100). JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 28(1), 20–26.
Vancouver
1.
Knaepen W, Demeulemeester J, Jordan-Sweet J, Vantomme A, Detavernier C, Vanmeirhaeghe R, et al. In situ x-ray diffraction study of Ni-Yb interlayer and alloy systems on Si(100). JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 2010;28(1):20–6.
MLA
Knaepen, Werner, J Demeulemeester, J Jordan-Sweet, et al. “In Situ X-ray Diffraction Study of Ni-Yb Interlayer and Alloy Systems on Si(100).” JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 28.1 (2010): 20–26. Print.
@article{977835,
  author       = {Knaepen, Werner and Demeulemeester, J and Jordan-Sweet, J and Vantomme, A and Detavernier, Christophe and Vanmeirhaeghe, Roland and Lavoie, C},
  issn         = {0734-2101},
  journal      = {JOURNAL OF VACUUM SCIENCE \& TECHNOLOGY A},
  keyword      = {FILMS,MARKER,FULLY SILICIDED GATES},
  language     = {eng},
  number       = {1},
  pages        = {20--26},
  title        = {In situ x-ray diffraction study of Ni-Yb interlayer and alloy systems on Si(100)},
  url          = {http://dx.doi.org/10.1116/1.3259875},
  volume       = {28},
  year         = {2010},
}

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