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Embedded high resolution sensor based on optical feedback in a Vertical Cavity Surface Emitting Laser

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Abstract
This paper describes the fabrication of a novel type of pressure sensor based on optical feedback in a Vertical Cavity Surface Emitting Laser (VCSEL). The detection mechanism of the sensor is based on a displacement measurement through self-mixing interferometry in the laser cavity. Using this technique a sensing resolution of half the laser wavelength can be achieved. The use of unpackaged VCSELs allows the integration of the sensor in a flexible polymer material, which enables thin and ultimately bendable optical sensing foils. Moreover, the use of unpackaged dies limits the sensor dimensions and minimizes the distance between two sensing points. Consequently, dense matrices of highly accurate sensing points can be fabricated. A proof of principle set-up for this new sensing mechanism has been developed and a first demonstrator has been fabricated and characterized.
Keywords
DIODE, MODES, High resolution sensor, Vertical Cavity Surface Emitting Laser, Self-mixing interferometry, Optical sensing, Optical feedback, Integration

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MLA
Van Hoe, Bram et al. “Embedded High Resolution Sensor Based on Optical Feedback in a Vertical Cavity Surface Emitting Laser.” Proceedings of SPIE, the International Society for Optical Engineering. Ed. Kara J Peters, Wolfgang Ecke, & Theodore E Matikas. Vol. 7648. Bellingham, WA, USA: SPIE, the International Society for Optical Engineering, 2010. Print.
APA
Van Hoe, B., Lamon, D., Bosman, E., Van Steenberge, G., Missinne, J., Goethals, P., Krassimir, P., et al. (2010). Embedded high resolution sensor based on optical feedback in a Vertical Cavity Surface Emitting Laser. In K. J. Peters, W. Ecke, & T. E. Matikas (Eds.), Proceedings of SPIE, the International Society for Optical Engineering (Vol. 7648). Presented at the Smart Sensor Phenomena, Technology, Networks, and Systems 2010, Bellingham, WA, USA: SPIE, the International Society for Optical Engineering.
Chicago author-date
Van Hoe, Bram, Deben Lamon, Erwin Bosman, Geert Van Steenberge, Jeroen Missinne, Pauwel Goethals, Panajotov Krassimir, Dominiek Reynaerts, Jan Vanfleteren, and Peter Van Daele. 2010. “Embedded High Resolution Sensor Based on Optical Feedback in a Vertical Cavity Surface Emitting Laser.” In Proceedings of SPIE, the International Society for Optical Engineering, ed. Kara J Peters, Wolfgang Ecke, and Theodore E Matikas. Vol. 7648. Bellingham, WA, USA: SPIE, the International Society for Optical Engineering.
Chicago author-date (all authors)
Van Hoe, Bram, Deben Lamon, Erwin Bosman, Geert Van Steenberge, Jeroen Missinne, Pauwel Goethals, Panajotov Krassimir, Dominiek Reynaerts, Jan Vanfleteren, and Peter Van Daele. 2010. “Embedded High Resolution Sensor Based on Optical Feedback in a Vertical Cavity Surface Emitting Laser.” In Proceedings of SPIE, the International Society for Optical Engineering, ed. Kara J Peters, Wolfgang Ecke, and Theodore E Matikas. Vol. 7648. Bellingham, WA, USA: SPIE, the International Society for Optical Engineering.
Vancouver
1.
Van Hoe B, Lamon D, Bosman E, Van Steenberge G, Missinne J, Goethals P, et al. Embedded high resolution sensor based on optical feedback in a Vertical Cavity Surface Emitting Laser. In: Peters KJ, Ecke W, Matikas TE, editors. Proceedings of SPIE, the International Society for Optical Engineering. Bellingham, WA, USA: SPIE, the International Society for Optical Engineering; 2010.
IEEE
[1]
B. Van Hoe et al., “Embedded high resolution sensor based on optical feedback in a Vertical Cavity Surface Emitting Laser,” in Proceedings of SPIE, the International Society for Optical Engineering, San Diego, CA, USA, 2010, vol. 7648.
@inproceedings{974876,
  abstract     = {This paper describes the fabrication of a novel type of pressure sensor based on optical feedback in a Vertical Cavity Surface Emitting Laser (VCSEL). The detection mechanism of the sensor is based on a displacement measurement through self-mixing interferometry in the laser cavity. Using this technique a sensing resolution of half the laser wavelength can be achieved. The use of unpackaged VCSELs allows the integration of the sensor in a flexible polymer material, which enables thin and ultimately bendable optical sensing foils. Moreover, the use of unpackaged dies limits the sensor dimensions and minimizes the distance between two sensing points. Consequently, dense matrices of highly accurate sensing points can be fabricated. A proof of principle set-up for this new sensing mechanism has been developed and a first demonstrator has been fabricated and characterized.},
  articleno    = {76480N},
  author       = {Van Hoe, Bram and Lamon, Deben and Bosman, Erwin and Van Steenberge, Geert and Missinne, Jeroen and Goethals, Pauwel and Krassimir, Panajotov and Reynaerts, Dominiek and Vanfleteren, Jan and Van Daele, Peter},
  booktitle    = {Proceedings of SPIE, the International Society for Optical Engineering},
  editor       = {Peters, Kara J and Ecke, Wolfgang and Matikas, Theodore E},
  isbn         = {9780819480637},
  issn         = {0277-786X},
  keywords     = {DIODE,MODES,High resolution sensor,Vertical Cavity Surface Emitting Laser,Self-mixing interferometry,Optical sensing,Optical feedback,Integration},
  language     = {eng},
  location     = {San Diego, CA, USA},
  pages        = {9},
  publisher    = {SPIE, the International Society for Optical Engineering},
  title        = {Embedded high resolution sensor based on optical feedback in a Vertical Cavity Surface Emitting Laser},
  url          = {http://dx.doi.org/10.1117/12.847647},
  volume       = {7648},
  year         = {2010},
}

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