Programmable silicon photonic circuits powered by MEMS

Bogaerts, Wim; Takabayashi, Alain Yuji; Edinger, Pierre; Jo, Gaehun; Zand, Iman; Verheyen, Peter; Jezzini, Moises; Sattari, Hamed; Talli, Giuseppe; Antony, Cleitus; Saei, Mehrdad; Lerma Arce, Cristina; Lee, Jun Su; Kumar Mallik, Arun; Kumar, Saurav; Garcia, Marco; Jonuzi, Tigers; Gylfason, Kristinn B.; Quack, Niels; Niklaus, Frank; Khan, Umar

Programmable silicon photonic circuits powered by MEMS

Wim Bogaerts (UGent) , Alain Yuji Takabayashi, Pierre Edinger, Gaehun Jo, Iman Zand (UGent) , Peter Verheyen, Moises Jezzini, Hamed Sattari, Giuseppe Talli, Cleitus Antony, et al.

(2022) SPIE OPTO : Smart Photonic and Optoelectronic Integrated Circuits 2022. In Proceedings of SPIE 12005.

Author

Wim Bogaerts (UGent) , Alain Yuji Takabayashi, Pierre Edinger, Gaehun Jo, Iman Zand (UGent) , Peter Verheyen, Moises Jezzini, Hamed Sattari, Giuseppe Talli, Cleitus Antony, Mehrdad Saei, Cristina Lerma Arce, Jun Su Lee, Arun Kumar Mallik, Saurav Kumar, Marco Garcia, Tigers Jonuzi, Kristinn B. Gylfason, Niels Quack, Frank Niklaus and Umar Khan (UGent)

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Abstract

We present our work to extend silicon photonics with MEMS actuators to enable low-power, large scale programmable photonic circuits. For this, we start from the existing iSiPP50G silicon photonics platform of IMEC, where we add free-standing movable waveguides using a few post-processing steps. This allows us to implement phase shifters and tunable couplers using electrostatically actuated MEMS, while at the same time maintaining all the original functionality of the silicon photonics platform. The MEMS devices are protected using a wafer-level sealing approach and interfaced with custom multi-channel driver and readout electronics.

Keywords

Silicon Photonics, Programmable Photonics, Micro-electromechanical Systems

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Please use this url to cite or link to this publication: http://hdl.handle.net/1854/LU-8759816

MLA: Bogaerts, Wim, et al. “Programmable Silicon Photonic Circuits Powered by MEMS.” SPIE OPTO : Smart Photonic and Optoelectronic Integrated Circuits 2022, edited by Sailing He and Laurent Vivien, vol. 12005, SPIE, 2022, doi:10.1117/12.2614213.
APA: Bogaerts, W., Takabayashi, A. Y., Edinger, P., Jo, G., Zand, I., Verheyen, P., … Khan, U. (2022). Programmable silicon photonic circuits powered by MEMS. In S. He & L. Vivien (Eds.), SPIE OPTO : Smart Photonic and Optoelectronic Integrated Circuits 2022 (Vol. 12005). https://doi.org/10.1117/12.2614213
Chicago author-date: Bogaerts, Wim, Alain Yuji Takabayashi, Pierre Edinger, Gaehun Jo, Iman Zand, Peter Verheyen, Moises Jezzini, et al. 2022. “Programmable Silicon Photonic Circuits Powered by MEMS.” In SPIE OPTO : Smart Photonic and Optoelectronic Integrated Circuits 2022, edited by Sailing He and Laurent Vivien. Vol. 12005. SPIE. https://doi.org/10.1117/12.2614213.
Chicago author-date (all authors): Bogaerts, Wim, Alain Yuji Takabayashi, Pierre Edinger, Gaehun Jo, Iman Zand, Peter Verheyen, Moises Jezzini, Hamed Sattari, Giuseppe Talli, Cleitus Antony, Mehrdad Saei, Cristina Lerma Arce, Jun Su Lee, Arun Kumar Mallik, Saurav Kumar, Marco Garcia, Tigers Jonuzi, Kristinn B. Gylfason, Niels Quack, Frank Niklaus, and Umar Khan. 2022. “Programmable Silicon Photonic Circuits Powered by MEMS.” In SPIE OPTO : Smart Photonic and Optoelectronic Integrated Circuits 2022, ed by. Sailing He and Laurent Vivien. Vol. 12005. SPIE. doi:10.1117/12.2614213.
Vancouver: 1.
Bogaerts W, Takabayashi AY, Edinger P, Jo G, Zand I, Verheyen P, et al. Programmable silicon photonic circuits powered by MEMS. In: He S, Vivien L, editors. SPIE OPTO : Smart Photonic and Optoelectronic Integrated Circuits 2022. SPIE; 2022.
IEEE: [1]
W. Bogaerts et al., “Programmable silicon photonic circuits powered by MEMS,” in SPIE OPTO : Smart Photonic and Optoelectronic Integrated Circuits 2022, San Francisco, USA, 2022, vol. 12005.

@inproceedings{8759816,
  abstract     = {{We present our work to extend silicon photonics with MEMS actuators to enable low-power, large scale programmable photonic circuits. For this, we start from the existing iSiPP50G silicon photonics platform of IMEC, where we add free-standing movable waveguides using a few post-processing steps. This allows us to implement phase shifters and tunable couplers using electrostatically actuated MEMS, while at the same time maintaining all the original functionality of the silicon photonics platform. The MEMS devices are protected using a wafer-level sealing approach and interfaced with custom multi-channel driver and readout electronics.}},
  articleno    = {{1200509}},
  author       = {{Bogaerts, Wim and Takabayashi, Alain Yuji and Edinger, Pierre and Jo, Gaehun and Zand, Iman and Verheyen, Peter and Jezzini, Moises and Sattari, Hamed and Talli, Giuseppe and Antony, Cleitus and Saei, Mehrdad and Lerma Arce, Cristina and Lee, Jun Su and Kumar Mallik, Arun and Kumar, Saurav and Garcia, Marco and Jonuzi, Tigers and Gylfason, Kristinn B. and Quack, Niels and Niklaus, Frank and Khan, Umar}},
  booktitle    = {{SPIE OPTO : Smart Photonic and Optoelectronic Integrated Circuits 2022}},
  editor       = {{He, Sailing and Vivien, Laurent}},
  isbn         = {{9781510648821}},
  issn         = {{0277-786X}},
  keywords     = {{Silicon Photonics,Programmable Photonics,Micro-electromechanical Systems}},
  language     = {{eng}},
  location     = {{San Francisco, USA}},
  pages        = {{15}},
  publisher    = {{SPIE}},
  title        = {{Programmable silicon photonic circuits powered by MEMS}},
  url          = {{http://doi.org/10.1117/12.2614213}},
  volume       = {{12005}},
  year         = {{2022}},
}

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Programmable silicon photonic circuits powered by MEMS

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