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Abstract
Programmable photonics promise a plethora of optical functions while at the same time reducing the time and costs of photonic integrated circuit (PIC) development. One primary bottleneck for development of these systems is the difficulty in increasing component density because of excessive power consumption. We here present a MEMS-based Silicon Photonic power coupler that offers high optical performance (> 18 dB extinction ratio (ER), < 1.2 dB insertion loss (IL), and > 80 nm of optical bandwidth) within a compact footprint (25 mu m x 150 mu m) to provide a power-efficient active function: fast, continuous power tuning.
Keywords
Microelectromechanical systems, photonic integrated circuits, silicon, photonics, photonics, power coupler

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Citation

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MLA
Takabayashi, Alain Y., et al. “Compact Integrated Silicon Photonic Mems Power Coupler for Programmable Photonics.” 2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS), IEEE, 2022, pp. 216–19, doi:10.1109/MEMS51670.2022.9699708.
APA
Takabayashi, A. Y., Silva, D., Sattari, H., Edinger, P., Verheyen, P., Gylfason, K. B., … Quack, N. (2022). Compact integrated silicon photonic mems power coupler for programmable photonics. 2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS), 216–219. https://doi.org/10.1109/MEMS51670.2022.9699708
Chicago author-date
Takabayashi, Alain Y., Duarte Silva, Hamed Sattari, Pierre Edinger, Peter Verheyen, Kristinn B. Gylfason, Wim Bogaerts, and Niels Quack. 2022. “Compact Integrated Silicon Photonic Mems Power Coupler for Programmable Photonics.” In 2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS), 216–19. IEEE. https://doi.org/10.1109/MEMS51670.2022.9699708.
Chicago author-date (all authors)
Takabayashi, Alain Y., Duarte Silva, Hamed Sattari, Pierre Edinger, Peter Verheyen, Kristinn B. Gylfason, Wim Bogaerts, and Niels Quack. 2022. “Compact Integrated Silicon Photonic Mems Power Coupler for Programmable Photonics.” In 2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS), 216–219. IEEE. doi:10.1109/MEMS51670.2022.9699708.
Vancouver
1.
Takabayashi AY, Silva D, Sattari H, Edinger P, Verheyen P, Gylfason KB, et al. Compact integrated silicon photonic mems power coupler for programmable photonics. In: 2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS). IEEE; 2022. p. 216–9.
IEEE
[1]
A. Y. Takabayashi et al., “Compact integrated silicon photonic mems power coupler for programmable photonics,” in 2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS), Tokyo, JAPAN, 2022, pp. 216–219.
@inproceedings{8759810,
  abstract     = {{Programmable photonics promise a plethora of optical functions while at the same time reducing the time and costs of photonic integrated circuit (PIC) development. One primary bottleneck for development of these systems is the difficulty in increasing component density because of excessive power consumption. We here present a MEMS-based Silicon Photonic power coupler that offers high optical performance (> 18 dB extinction ratio (ER), < 1.2 dB insertion loss (IL), and > 80 nm of optical bandwidth) within a compact footprint (25 mu m x 150 mu m) to provide a power-efficient active function: fast, continuous power tuning.}},
  author       = {{Takabayashi, Alain Y. and Silva, Duarte and Sattari, Hamed and Edinger, Pierre and Verheyen, Peter and Gylfason, Kristinn B. and Bogaerts, Wim and Quack, Niels}},
  booktitle    = {{2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS)}},
  isbn         = {{9781665409117}},
  issn         = {{1084-6999}},
  keywords     = {{Microelectromechanical systems,photonic integrated circuits,silicon,photonics,photonics,power coupler}},
  language     = {{eng}},
  location     = {{Tokyo, JAPAN}},
  pages        = {{216--219}},
  publisher    = {{IEEE}},
  title        = {{Compact integrated silicon photonic mems power coupler for programmable photonics}},
  url          = {{http://doi.org/10.1109/MEMS51670.2022.9699708}},
  year         = {{2022}},
}

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